aNexus AIXTRON Closed Coupled Showerhead® CCS Systems for R&D

“Flexible MOCVD system for R&D and small scale production”

Key Benefits

• Versatile R&D platform with integrated glovebox
  • True scaling from R&D to mass production
  • Inherently uniform and reproducible growth for all material systems
  • High flexibility in process window for excellent material quality and uniformity
• Ideal for small R&D budgets: lowest running cost
  • Low gas flows and high precursor efficiency
  • Easy and low cost maintenance

Product Features

• High flexibility for various MO and hydride sources
• Digital mass flow controllers and pressure controllers
• Professional AIXACT® Advanced Control System with HTML-based GUI
• Compact footprint

CCS

• Proven Close Coupled Showerhead® reactor with 3-zone heater
• Dynamic process gap adjustment – effective process tuning for higher performance
• 1400°C surface temperature option
• In-situ monitoring with Laytec EpiTT, EpiCurveTT, and others on request
• AIXTRON ARGUS full wafer temperature mapping
• AIXTRON EPISON® gas concentration sensors Configurations (by simple carrier exchange):
  • 3×2 inch, 1×3 inch, 1×4 inch
  • 6×2 inch, 7×2 inch, 3×3 inch, 1×4 inch, 1×6 inch
  • 19×2 inch, 7×3 inch, 5×4 inch, 1×6 inch, 1×8 inch