InfraScan(TM) ES

infrascanES

The InfraScantm ES emission detection system is ready for your toughest photoemission assignments. It collects and localizes the faint NIR emissions from your DUT. The collection optics coupled with the latest NIR detector technology work together registering even the smallest of signals. The inverted design allows for direct docking with high-speed testers for FA and debug applications related to device frequency or power. Today's highdensity back end metal layers obscure the emission signal when attempting to do PEM from the front side of the DUT. The InfraScantm ES is optimized for backside imaging from its optics to its navigation aids allowing quick and precise emission localization.

The GUI displays this information in visual form in combination with data from imported CAD files. By precise overlay registration of the images, defect sites are accurately located.